Tcursor® series: Ts-Zr2

Characteristics

  • Melting point: -20°C
  • Vapor pressure: 0.1Torr (77°C)
  • Decomposition temperature: 240°C
  • Good volatility
  • Higher thermal stability than Zr(NEtMe)4
  • Liquid at room temperature

Thermal CVD with O₂

  • Melting point: <-20°C
  • Vapor pressure: 0.1Torr (77°C)
  • Decomposition temperature: 240°C

Volatility & Thermal Stability

Thermal CVD with O₂